Skip to main content
SpringerLink
Log in

Effect of thermal treatment on the properties of YBa2Cu3O7-x thin films with multilayer Al/Cr/Yb metals as ohmic contact electrodes

  • Published:
Journal of Electronic Materials Aims and scope Submit manuscript

Abstract

Detailed studies were conducted on YBa2Cu3O7-x thin films with multilayer Al/Cr/Yb metals as ohmic contact electrodes. Ytterbium not only provided an excellent ohmic contact to YBa2Cu3O7-x thin films, but also improved the zero resistance temperature after thermal treatment of the contacts. Superconducting thin films with zero resistance temperature of around 90 K with extremely sharp resistivity transitions, contact current density greater than 1.3 x 103A/cm2, and specific contact resistivity as low as 10-9 ohm · cm2 at 77 K were achieved on yttrium stabilized ZrO2 substrates. This occurred after contact deposition and thermal treatment at 450° C in pure oxygen for 20 min.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. Y. Tzeng, A. Holt, and R. Ely, Appl. Phys. Lett.52, 155 (1988).

    Article  CAS  Google Scholar 

  2. J. W. Ekin, A. J. Panson and B. A. Blankenship, Appl. Phys. Lett.52, 331 (1988).

    Article  CAS  Google Scholar 

  3. R. Caton, R. Selim, A. M. Buoncristiani and C. E. Byvik, Appl. Phys. Lett.52, 1014 (1988).

    Article  CAS  Google Scholar 

  4. A. D. Wieck, Appl. Phys. Lett.52, 1017 (1988).

    Article  CAS  Google Scholar 

  5. K. Mizushima, M. Sagoi, T. Miura and J. Yoshida, Appl. Phys. Lett.52, 1101 (1988).

    Article  CAS  Google Scholar 

  6. J. W. Ekin, T. M. Larson, N. F. Bergren, A. J. Nelson, A. B. Wartzlander, L. L. Kazermerski, A. J. Panson and B. A. Lankenship, Appl. Phys. Lett.52, 819 (1988).

    Article  Google Scholar 

  7. L. R. Tessler, U. Dai, N. Hess and G. Deutscher, J. Phys. D: Appl. Phys.21, 152 (1988).

    Article  Google Scholar 

  8. J. D. Katz, J. O. Willis, M. P. Maley and R. G. Castro, J. Appl. Phys.65, 792 (1989).

    Article  Google Scholar 

  9. Y. Suzuki, T. Kusaka, T. Aoyama, T. Yotsuya and S. Ogawa, Appl. Phys. Lett.54, 666 (1989).

    Article  CAS  Google Scholar 

  10. S. Jin, M. E. Davis, T. H. Tiefel, R. B. van Dover, R. C. Sherwood, H. M. O’bryan, G. W. Kammlott and R. A. Fastnacht, Appl. Phys. Lett.54, 605 (1989).

    Google Scholar 

  11. J. P. Zheng and H. S. Kwok, private communication.

  12. G. Rajeswaran, V. J. Rao, M. A. Jackson, M. Thayer, W. A. Anderson and B. B. Rao, IEEE Trans. Electron Devices30, 840 (1983).

    Google Scholar 

  13. B. B. Rao, S. Banerjee, W. A. Anderson and M. K. Han, IEEE Trans. Electron Devices32, 817 (1985).

    Google Scholar 

  14. K. C. Reinhardt, A. Singh and W. A. Anderson, Solid State Electron.31, 537 (1988).

    Article  Google Scholar 

  15. G. Xiao, F. H. Streitz, A. Gavrin and C. L. Chien, Solid State Commun.63, 817 (1987).

    Article  Google Scholar 

  16. N. Terada, H. Ihara, M. Jo, M. Hirabayashi, Y. Kimura, K.Matsutani, K. Hirata, E. Ohno, R. Sugise and F. Kawashima, Jpn. J. Appl. Phys.27, L639 (1988).

    Article  CAS  Google Scholar 

  17. R. L. Sanstrom, W. J. Gallagher, T. R. Dinger, R. H. Koch, R. B. Laibowitz, A. W. Kleinsasser, R. J. Gambino, B. Bumble and M. F. Chisholm, Appl. Phys. Lett.53, 444 (1988).

    Article  Google Scholar 

  18. Q. X. Jia, D. Ren and W. A. Anderson, Int. J. Modem Phys.B3, 743 (1989).

    Article  Google Scholar 

  19. R. P. Vasquez, M. C. Foote and B. D. Hunt, Appl. Phys. Lett54, 1060 (1989).

    Article  CAS  Google Scholar 

  20. M. Oshima, Y. Yamada, T. Kawamura, S. Maeyama, K. Hohkawa, Y. Tazoh and T. Miyahara, Jpn. J. Appl. Phys.27, L2233 (1988).

    Article  CAS  Google Scholar 

  21. Q. R. Zhang, Y. T. Qian, Z. Y. Chen, W. Y. Guan, Y. Zhao, H. Zhang, L. S. Xia, G. Q. Pan, M. J. Zhang, S. F. Sun, D. Q. Yu, Z. H. He, M. H. Fang and T. Zhang, Solid State Commun.63, 91 (1987).

    Article  Google Scholar 

  22. H. S. Chen, A. R. Kortan, F. A. Thiel and L. C. Kimerling, Appl. Phys. Lett.55, 191 (1989).

    Article  CAS  Google Scholar 

  23. C. B. Eom, J. Z. Sun, K. Yamamoto, A. F. Marshall, K.E. Luther, T. H. Geballe and S. S. Laderman, Appl. Phys. Lett.55, 595 (1989).

    Article  CAS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. State University of New York at Buffalo, Department of Electrical and Computer Engineering and Institute on Superconductivity, Bonner Hall, 14260, Amherst, NY

    Q. X. Jia & W. A. Anderson

Authors
  1. Q. X. Jia
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. W. A. Anderson
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Jia, Q.X., Anderson, W.A. Effect of thermal treatment on the properties of YBa2Cu3O7-x thin films with multilayer Al/Cr/Yb metals as ohmic contact electrodes. J. Electron. Mater. 19, 443–447 (1990). https://doi.org/10.1007/BF02658004

Download citation

  • Received:

  • Revised:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF02658004

Key words

Search

Navigation