Abstract
A multi-wavelengthinsitu spectroscopic ellipsometer system is described. The hardware can acquire accurate ellipsometric data at 44 wavelengths in less than one second, is simple and compact, and is well suited forin-situ monitoring of chemical vapor deposition. The software used for data analysis is capable of determining the growth rate and composition of the growing layer in real time. These tools were used to study the organometallic chemical vapor deposition of CdTe, HgTe, and HgCdTe on GaAs. We could obtain the dielectric constants of these materials at the growth temperature and also the growth rate and composition of the layers in real time. Feedback control of CdTe growth was performed by connecting an analog control voltage line from the data acquisition/ analysis computer to the dimethylcadmium mass flow controller. Using dielectric constants of HgCdTe for two different compositions at the growth temperature, composition control of HgCdTe was attempted in a similar manner.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
D.E. Aspnes, R. Bhat, C. Caneau, E. Colas, L.T. Florez, S. Gregory, J.P. Harbison, I. Kamiya, V.G. Keramidas, M.A. Koza, M.A.A. Pudensi, W.E. Quinn, S.A. Schwarz, M.C. Tamargo and H. Tanaka,J. Cryst. Growth 120, 71 (1992).
S.J.C Irvine, J. Bajaj, H.O. Sankur and S.A. Svoronos,J. Electron. Mater. 22, 899 (1993).
R.M.A. Azzam and N. M. Bashara,Ellipsometry and Polarized Light, (Amsterdam: North-Holland, 1977).
J.B. Theeten, F. Hottier and J. Hallais,J. Cryst. Growth 46, 245 (1979).
D.E. Aspnes, W.E. Quinn and S. Gregory,Appl. Phys. Lett. 57, 707 (1990).
D.R. Rhiger,J. Electron. Mater. 22, 887 (1993) (and references therein).
B. Johs, S. Pittal, D. Doerr, I. Bhat and S. Dakshina Murthy,Thin Solid Films 234, 293 (1993).
R.W. Collins,Rev. Sci. Instru. 61, 2029 (1990).
S.H. Russev,Appl. Opt. 28,1504 (1989).
B. Johs,Thin Solid Films 234, 395 (1993).
W.H. Press, B.P. Flannery, S.A. Teukolsky and W.T. Vetterling,Numerical Recipes in C (Cambridge University Press, 1988).
W.A. McGahan, B. Johs and J.A. Woollam,Thin Solid Films 234, 443 (1993).
D.E. Aspnes,Appl. Phys. Lett. 62, (4), May (1993).
D.A.G. Bruggeman,Ann. Phys. (Leipzig), 24, 636 (1935).
P.G. Snyder, J.A. Woollam, S.A. Alterovitz and B. Johs,J. Appl. Phys. 68, 925 (1990).
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Murthy, S.D., Bhat, I.B., Johs, B. et al. Application of spectroscopic ellipsometry for real-time control of CdTe and HgCdTe growth in an OMCVD system. J. Electron. Mater. 24, 445–449 (1995). https://doi.org/10.1007/BF02657946
Received:
Revised:
Issue Date:
DOI: https://doi.org/10.1007/BF02657946