A high-performance thermal module for computer packaging

Abstract

A thermal module was designed to transfer heat efficiently from high power dissipation chips to a liquid coolant via forced convection. Turbulent and laminar flow regimes were investigated. Channel geometries for deep channels (1000 μm deep, and used for turbulent flow), and shallow channels (100 μm deep, and used for laminar flow) were optimized for high heat transfer coefficient, ease of fabrication, and better structural rigidity of the module. A 4″ x 4″ module, made out of Cu, was tested using a 4″ Si “thermal” wafer as a heat generating source as well as a temperature sensor. Wafer scale integration and high energy ion implantation were employed to obtain nine l x l cm heat sources, and temperature sensing diodes embedded within the thermal wafer. For the deep channel design, the maximum device temperature rise on the module was 18° C for a power dissipation of 42 W/chip, and a flow rate of 126 cc/sec. For the shallow channel design, the temperature rise was 19° C for a flow rate of 19 cc/sec, and a power dissipation level of 42 W/chip. With all nine chips on the thermal module powered to 42 W/chip, the maximum chip to chip temperature variations were found to be 2 and 8° C for deep and shallow channel designs, respectively.