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Spectroscopic ellipsometry studies of excitonic features and optical functions of AlxGa1−xAs/GaAs multiple quantum well structures

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Abstract

Spectroscopic ellipsometry has been shown to provide a rapid, room-temperature, non-destructive assessment technique for quantum well structures ranging from a single well to 100-period structures. Barrier and well thicknesses and self-consistent quantised transition energies have been determined from a single measurement. Good agreement for the first three transition energies was obtained for a series of well widths, using a 65% conduction band offset. Modelling the spectra by using individual layer bulk dielectric functions and by effective layer approximations has been compared. The optical functions of a single 50Å well structure have been determined.

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Pickering, C., Shand, B.A. & Smith, G.W. Spectroscopic ellipsometry studies of excitonic features and optical functions of AlxGa1−xAs/GaAs multiple quantum well structures. J. Electron. Mater. 19, 51–58 (1990). https://doi.org/10.1007/BF02655551

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