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Direct growth of CdTe on (100), (211), and (111) Si by metalorganic chemical vapor deposition

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Abstract

CdTe epilayers were grown directly on (100), (211), and (111) silicon substrates by metalorganic chemical vapor deposition (MOCVD). The crystallinity and the growth orientation of the CdTe film were dependent on the surface treatment of the Si substrate. The surface treatment consisted of exposure of the Si surface to diethyltelluride (DETe) at temperatures over 600°C prior to CdTe growth. Direct growth of CdTe on (100) Si produced polycrystalline films whereas (lll)B single crystals grew when Si was exposed to DETe prior to CdTe growth. On (211) Si, single crystal films with (133)A orientation was obtained when grown directly; but produced films with (211)A orientation when the Si surface was exposed to DETe. On the other hand, only (lll)A CdTe films were possible on (111) Si, both with and without Te source exposure, although twinning was increased after exposure. The results indicate that the exposure to a Te-source changes the initial growth stage significantly, except for the growth on (111) Si. We propose a model in which a Te atom replaces a Si atom that is bound to two Si atoms.

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Author notes

  1. M. Uchikoshi

    Present address: Kumamoto Polytechnic College, Japan

Authors and Affiliations

  1. Fujitsu Laboratories Ltd., 10-1 Morinosato-Wakamiya, 243-01, Atsugi, Japan

    H. Ebe, T. Okamoto, H. Nishino, T. Saito & Y. Nishijima

  2. Japan Defense Agency, 1-2-24 Ikejiri, Setagaya, 154, Tokyo, Japan

    M. Uchikoshi, M. Nagashima & H. Wada

Authors
  1. H. Ebe
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  2. T. Okamoto
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  3. H. Nishino
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  4. T. Saito
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  5. Y. Nishijima
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  6. M. Uchikoshi
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  7. M. Nagashima
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  8. H. Wada
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Ebe, H., Okamoto, T., Nishino, H. et al. Direct growth of CdTe on (100), (211), and (111) Si by metalorganic chemical vapor deposition. J. Electron. Mater. 25, 1358–1361 (1996). https://doi.org/10.1007/BF02655033

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  • DOI: https://doi.org/10.1007/BF02655033

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