Abstract
Recent improvements in sputter initiated resonance ionization spectroscopy (SIRIS) have now made it possible to measure copper in HgCdTe films into the low 1013 cm−3 range. We have used this technique to show that copper is responsible for type conversion in n-type HgCdTe films. Good n-type LPE films were found to have less than 1 x 1014 cm−3 copper, while converted p-type samples were found to have copper concentrations approximately equal to the hole concentrations. Some compensated n-type samples with low mobilities have copper concentrations too low to account for the amount of compensation and the presence of a deep acceptor level is suggested. In order to study diffusion of copper from substrates into LPE layers, a CdTe boule was grown intentionally spiked with copper at approximately 3 x 1016 cm−3. Annealing HgCdTe films at 360°C was found to greatly increase the amount of copper that diffuses out of the substrates and a substrate screening technique was developed based on this phenomenon. SIRIS depth profiles showed much greater copper in HgCdTe films than in the substrates, indicating that copper is preferentially attracted to HgCdTe over Cd(Zn)Te. SIRIS spatial mapping showed that copper is concentrated in substrate tellurium inclusions 5–25 times greater than in the surrounding CdZnTe matrix.
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References
M.G. Astles, H. Hill, G. Blackmore, S. Courtney and N. Shaw,J. Cryst. Growth 91, 1 (1988).
P. Rudolph, M. Muhlberg, M. Neubert, T. Boeck, P. Mock, L. Parthier, K. Jacobs and E. Kropp,J. Cryst. Growth 118, 204 (1992).
J.P. Tower, S.P. Tobin, M. Kestigian, P.W. Norton, A.B. Bollong, H.F. Schaake and C.K. Ard,J. Electron. Mater. 24 (5), 497 (1995).
T.H. Myers, K.A. Harris, R.W. Yanka, L.M. Mohnkern, R.J. Williams and G.K. Dudoff,J. Vac. Sci. Technol. B 10, 1438 (1992).
R. Korenstein, R J. Olson, Jr., D. Lee, P.K. Liao and C.A. Castro,J. Electron. Mater. 24 (5), 511 (1995).
S. Sen, J.E. Stannard, S.M. Johnson, H.F. Arlinghaus and G.I. Bekov,J. Electron, Mater. 24 (5), 515 (1995).
G.N. Pultz, P.W. Norton, E.E. Krueger and M.B. Reine,J. Vac. Sci. Technol. B 9, 1724 (1991).
M.C. Gold and D.A. Nelson,J. Vac. Sci. Technol. A 4, 2040 (1986).
H.F. Arlinghaus, M.T. Spaar and N. Thonnard,J. Vac. Sci. Technol. A 8, 2318 (1990).
H.F. Arlinghaus, M.T. Spaar, N. Thonnard, A.W. McMahon, T. Tanigaki, H. Shichi and P.H. Holloway,J. Vac. Sci. Technol. A 11, 2317 (1993).
H.F. Arlinghaus, M.T. Spaar, T. Tanigaki, A.W. McMahon and P.H. Holloway,J Vac. Sci. Technol. B 12, 263 (1994).
P.K. Chu,Encyclopedia of Materials Characterization, ed. C.R. Brundle, C.A. Evans and S. Wilson (Boston: Butterworth-Heinemann, 1992), p. 543.
K.K. Parat, N.R. Taskar, I.B. Bhat and S.K. Ghandi,J. Cryst. Growth 102, 413 (1990).
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Tower, J.P., Tobin, S.P., Norton, P.W. et al. Trace copper measurements and electrical effects in LPE HgCdTe. J. Electron. Mater. 25, 1183–1187 (1996). https://doi.org/10.1007/BF02655006
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DOI: https://doi.org/10.1007/BF02655006