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Oxidation through the zirconia substrates of heteroepitaxial silicon films Grown on yttria-stabilized cubic zirconia

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Abstract

We demonstrate the thermal oxidation of the Si side of the interface in epitaxial Si films grown on yttria-stabilized cubic zirconia, 〈Si〉/〈YSZ〉, to form a dual-layer structure of 〈Si〉 /amorphous SiO2/〈YSZ〉. The SiO2 films are formed in either dry oxygen (at 1100‡C) or in pyrogenic steam (at 925‡C) by the rapid diffusion of oxidizing species through the 425 Μm thick cubic zirconia substrate. For instance, a 0.17 Μm thick SiO2 layer is obtained after 100 min in pyrogenic steam at 925‡C. This relatively easy transport of oxidants is unique to YSZ and other insulators which are also superionic oxygen conductors, and cannot be achieved in other existing Si/insulator systems, such as Si-on-sapphire. The present process eliminates the most

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References

  1. I. Golecki, H.M. Manasevit, L.A. Moudy, J.J. Yang, and J.E. Mee, Appl. Phys. Lett.42 501 (1983).

    Article  CAS  Google Scholar 

  2. H.M. Manasevit, I. Golecki, L.A. Moudy, J.J. Yang, and J.E. Mee, J. Electrochem. Soc.130, 752 (1983).

    Article  Google Scholar 

  3. A.L. Lin and I. Golecki, Proc. 9th Intl. Conf. on Chemical Vapor Deposition, Cincinnati, OH, May 1984, Electrochem. Soc. Proc. Vol.84-6, 175 (1984).

    CAS  Google Scholar 

  4. By M.C. Ohmer and J.O. Crist, Electromagnetic Materials Division, Materials Laboratory, AFWAL, Wright-Patterson Air Force Base, OH 45433.

  5. I. Golecki, H.M. Manasevit, L.A. Moudy, J.J. Yang, J.E. Mee, and T.J. Magee, presented at the 24th Electronic Materials Conf., Fort Collins, CO, June 1982, paper # D-8.

  6. I. Golecki, Alternate Substrate Materials: Si on Yttria-Stabilized Cubic Zirconia (Si/YSZ), Final Technical Report # AFWAL-TR-83-4137 (January 1984).

  7. Y.S. Touloukian, Thermophysical Properties of High-Temperature Solid Materials, Vol.4 (MacMillan Co.: New York, 1967).

    Google Scholar 

  8. T.H. Nielsen and M.H. Leipold, J. Amer. Cer. Soc.47, 155 (1964).

    Article  CAS  Google Scholar 

  9. V.A. Osipova and V.A. Andrianova, Tr. Mosk. Energ. Inst.313 24–7 (1976).

    CAS  Google Scholar 

  10. For a recent review, see I. Golecki, Mat. Res. Soc. Symp. Proc.Vol. 33, 3 (1984), H.W. Lam and M.J. Thompson, eds.; presented at the 1984 Spring Meeting of the Materials Research Society, Albuquerque, NM, February 1984, paper # D.I.2.

  11. Status reports from I. Golecki to J.O. Crist and W.J. O'Brien (October 1983).

  12. I. Golecki, R.L. Maddox, H.L. Glass, A.L. Lin, and H.M. Manasevit, presented at the 26th Electronic Materials Conference, Santa Barbara, CA, June 1984, paper # K-3.

  13. I. Golecki, Nucl. Instrum. and Methods in Phys. Res.218, 63 (1983).

    Article  CAS  Google Scholar 

  14. I. Golecki, H.L. Glass, G. Kinoshita, and T.J. Magee, Applic. of Surf. Sei.9, 299 (1981).

    Article  CAS  Google Scholar 

  15. R.A. Kjar, P.E. Haynes, and J. Maurits, Manufacturing Methods and Technology Project for Establishing Production Techniques for CMOS Circuits Using Silicon On Sapphire, Final Technical Report # DELET-TR-80-0311-3 (November 1983).

  16. R.T. Smith and C.E. Weitzel, J. Cryst. Growth58, 61 (1982).

    Article  CAS  Google Scholar 

  17. I. Golecki, R.L. Maddox, H.L. Glass, A.L. Lin, and, H.M. Manasevit, in Proc. Symp. E: Applied Materials Characterization, 1985 Spring Meeting of the Materials Research Society, April 1985, San Francisco, CA (W. Katz and P. Williams, eds.), paper # E.I.6.

    Google Scholar 

  18. T.B. Reed, Free Energy of Formation of Binary Compounds (MIT Press: Cambridge, MA, 1971).

    Google Scholar 

  19. L. Heyne, in Solid Electrolytes, S. Geller, ed. (Springer: Berlin, 1977), Ch.7, p.169.

    Google Scholar 

  20. D.S. Tannhauser, J. Solid State Chem.55, 40 (1984).

    Article  CAS  Google Scholar 

  21. R.E.W. Casselton and J.C. Scott, Phys. Lett. A25A, 264 (1967).

    Article  Google Scholar 

  22. P.J. Jorgensen, J. Chem. Phys.37, 874 (1962).

    Article  CAS  Google Scholar 

  23. B.E. Deal and A.S. Grove, J. Appl. Phys.36, 3770 (1965).

    Article  CAS  Google Scholar 

  24. C. Wagner, Ber. Bunsenges. Phys. Chem.72, 778 (1968).

    CAS  Google Scholar 

  25. See e.g. D.W. Strickler and W.G. Carlson, J. Amer. Cer. Soc.47, 122 (1964).

    Article  CAS  Google Scholar 

  26. S.F. Palguev, V.K. Gilderman, and A.D. Neujmin, J. Electrochem. Soc.122, 745 (1975).

    Article  CAS  Google Scholar 

  27. J. Fouletier, P. Fabry, and M. Kleitz, J. Electrochem. Soc.123, 204 (1976).

    Article  CAS  Google Scholar 

  28. M. Kleitz, E. Fernandez, J. Fouletier, and P. Fabry, in Advances in Ceramics,Vol. 3, Science and Technology of Zirconia, L.W. Hobbs, ed., (American Ceramic Society, 1981) p.349.

  29. M. Kleitz, M. Levy, J. Fouletier, and P. Fabry, ibid., p.337.

  30. A.W. Smith, F.W. Meszaros, and C.D. Amata, J. Amer. Cer. Soc.49, 240 (1966).

    Article  CAS  Google Scholar 

  31. L. Heyne and N.M. Beekmans, in Proc. Brit. Cer. Soc.19, 229 (1971) — Meeting on Mass Transport in Non-Metallic Solids, Stoke-on-Trent.

    Google Scholar 

  32. H. Ullman, Z. Phys. Chem. (Leipzig)237, 71 (1968).

    Google Scholar 

  33. Data sheet on grade G-60 ZrO2 powder, Magnesium Elektron Ltd., Manchester, GB.

  34. D.S. Tannhauser, J.A. Kilner, and B.C.H. Steele, Nucl. Instrum. and Methods in Phys. Res.218, 504 (1983).

    Article  CAS  Google Scholar 

  35. W.H. Rhodes and R.E. Carter, J. Amer. Cer. Soc.49, 244 (1966).

    Article  CAS  Google Scholar 

  36. J.R. Patel and N. Kato, J. Appl. Phys.44, 971 (1973).

    Article  CAS  Google Scholar 

  37. E.P. EerNisse, Appl. Phys. Lett.30, 290 (1977) and35, 8 (1979).

    Article  CAS  Google Scholar 

  38. I. Golecki and I. Suni, Mat. Res. Soc. Symp. Proc.Vol. 14, 541 (1983), S. Mahajan and J.W. Corbett, eds. (North Holland: New York).

    Google Scholar 

  39. A.A. Lebedev, N.A. Sultanov, and P. Yusupov, Sov. Phys. Semicond.14, 342 (1980).

    Google Scholar 

  40. J.W. Chen and A.G. Milnes, Ann. Rev. Mater. Sci.10, 157 (1980), R.A. Huggins, R.H. Bube, and D.A. Vermilyea, eds.

    Article  CAS  Google Scholar 

  41. D. Pribat, L.M. Mercandalli, M. Croset, D. Dieu-megard, and J. Siejka, Mater. Lett.2, 524 (1984).

    Article  CAS  Google Scholar 

  42. L.M. Mercandalli, D. Pribat, M. Dupuy, C. Arnodo, D. Rondi, and D. Dieumegard, pre-print (1984); presented at the Symp. on Layered Structures, Epitaxy and Interfaces, 1984 Fall Meeting of the Materials Research Society, Boston, MA, November 1984, paper # D.3.12 (J.M. Gibson and L.R. Dawson, eds.).

  43. M. Croset. L.M. Mercandalli, and J. Siejka, Thin Solid Filmsl03, 221 (1983).

    Article  Google Scholar 

  44. S. Gourrier, P. Dimitriou, J.B. Theeten, J. Perrière, J. Siejka, and M. Croset, Appl. Phys. Lett.38, 33 (1981).

    Article  CAS  Google Scholar 

  45. P. Dimitriou and S. Gourrier, Revue Phys. Appl.16, 419 (1981).

    CAS  Google Scholar 

  46. R.P.H. Chang, J. Siejka, J. Perrière, and M. Croset, in Proc. Third Symp. on Plasma Processing, 160th Meeting of the Electrochemical Society, Denver, CO, October 1981.

  47. J. Perrière, J. Siejka, and R.P.H. Chang, Thin Solid Films95, 309 (1982).

    Article  Google Scholar 

  48. For a review, see J. Siejka, pre-print (1984); presented at the Symp. on Plasma Synthesis and Etching of Electronic Materials, 1984 Fall Meeting of the Materials Research Society, Boston, MA, November 1984, paper # F.3.1 (R.P.H. Chang and B. Abeles, eds.).

  49. J. Perrière, J. Siejka, and M. Croset, J. Electrochem. Soc.128, 530 (1981).

    Article  Google Scholar 

  50. K.P.R. Reddy and A.R. Cooper, J. Amer. Cer. Soc.64, 368 (1981).

    Article  CAS  Google Scholar 

  51. K. Ando and Y. Oishi, J. Chem. Phys.61, 625 (1974).

    Article  CAS  Google Scholar 

  52. M. Mikami, Y. Hokari, K. Egami, H. Tsuya, and M. Kanamori, 15th Conf. on Solid State Devices and Materials, Tokyo, Japan, September 1983, Extended Abstracts Volume, # A-2-3, p.31 (1983).

    Google Scholar 

  53. Y. Hokari, M. Mikami, K. Egami, H. Tsuya, and M. Kanamori, 1983 IEEE Intl. Electron Devices Mtg., Washington, D.C., December 1983, Technical Digest, # 14.6, p.368.

    Google Scholar 

  54. M. Mikami (private communication, 1984).

  55. T. Kato, T. Ito, M. Taguchi, T. Nakamura, and H. Ishikawa, 1983 Symp. on VLSI Technology, Maui, Hawaii, September 1983, Digest of Technical Papers, # 7-1, p.86 (1983).

  56. R. Pretorius, J.M. Harris, and M-A. Nicolet, Solid State Electron.21, 667 (1978).

    Article  CAS  Google Scholar 

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Author notes

  1. H. M. Manasevit

    Present address: TRW, Electro-Optics Research Center, 2525 El Segundo Boulevard, 90245, El Segundo, CA

Authors and Affiliations

  1. Microelectronics Research and Development Center, Rockwell International Corporation Defense Electronics Operations, 3370 Miraloma Avenue, 92803, Anaheim, CA

    I. Golecki (Visiting Associate), R. L. Maddox, H. L. Glass, A. L. Lin, T. J. Raab & H. M. Manasevit

  2. California Institute of Technology, Mail Code 116-81, 91125, Pasadena, CA

    I. Golecki (Visiting Associate)

  3. Rockwell International Science Center, 92803, Anaheim, CA

    H. L. Glass & A. L. Lin

  4. Rockwell International Materials and Process Laboratories, ASSD, 92803, Anaheim, CA

    T. J. Raab

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Golecki, I., Maddox, R.L., Glass, H.L. et al. Oxidation through the zirconia substrates of heteroepitaxial silicon films Grown on yttria-stabilized cubic zirconia. J. Electron. Mater. 14, 531–550 (1985). https://doi.org/10.1007/BF02654023

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