Abstract
Highly conducting and transparent cadmium oxide films have been deposited on Corning 7059 glass substrates by ion-beam sputtering and by spray pyrolysis. The electrical and optical properties of CdO films prepared by the two techniques are similar. Typical films of 0.5 μm thickness have electrical resistivities of (2–5) × 10-3 ohm-cm, carrier concentrations of approximately 1020 cm-3, and an optical transmission of higher than 70% in the wavelength range of 600–900 nm. An optical bandgap of 2.4–2.42 eV was deduced from the optical transmission data.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
J. Kocka and C. Konak, Phys. Status SolidB-43, 731 (1971).
A. Kunioka and Y. Saki, Jpn. J. Appl. Phys.7, 1138 (1968).
C. H. Champness, S. Fukuda and S. Jatar, Solar Energy Mater.5, 391 (1981).
I. Shih, S. Jatar, C. H. Champness and N. Liria, Solar Cells7, 327 (1982).
T. L. Chu, Shirley S. Chu, Y. Pauleau, K. Murthy and E. D. Stokes, J. Appl. Phys.54, 398 (1983).
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Chu, T.L., Chu, S.S. Degenerate cadmium oxide films for electronic devices. J. Electron. Mater. 19, 1003–1005 (1990). https://doi.org/10.1007/BF02652928
Received:
Issue Date:
DOI: https://doi.org/10.1007/BF02652928