Abstract
Experiments have been carried out to investigate thickness variations between epitaxial layers grown on ridges or channels and the surrounding planar surface. Results show a remarkable variation in growth velocity, even for relatively wide channels and ridges. Using these findings, a novel laser/waveguide coupling technique, which uses a single epitaxial growth step, is proposed.
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Buydens, L., Demeester, P., Van Ackere, M. et al. Thickness variations during MOVPE growth on patterned substrates. J. Electron. Mater. 19, 317–321 (1990). https://doi.org/10.1007/BF02651291
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DOI: https://doi.org/10.1007/BF02651291