Abstract
The central particle injection and long residence time characteristics of induction plasma have given rise to the complete melting of tungsten particles injected into an Ar- H2 plasma under soft vacuum conditions. The influences of process variables such as power level, chamber pressure, and spray distance on splat morphology, apparent density, and deposition efficiency have been studied. Dense tungsten deposits with no oxidation have been obtained. Scanning electron microscopy (SEM) micrographs reveal a well-flattened lamellar structure in deposits. Radiative cooling is observed to play a significant role in the plasma spraying of this refractory metal.
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References
M.L. Boulos and J. Jurewicz, Process of Depositing Particulate Material on a Substrate, U.S. Patent 4,853,250, Aug 1, 1989
M.I. Boulos, X.L. Jiang, and R. Tiwari, Induction Plasma Reactive Deposition of Refractory Ceramics, U.S. Patent Pending, 1992
T. Okada, H. Hamatani, and T. Yoshida, Radio Frequency Plasma Spraying of Ceramics,J. Am. Ceram. Soc., Vol 72, 1989, p 2111–2116
M.I. Boulos, RF Induction Plasma Spraying: State-of-the-Art Review,J. Thermal Spray Technol., Vol 1 (No. 1), 1992, p 33–40
X.L. Jiang, X.B. Fan, F. Gitzhofer, and M.I. Boulos, Induction Plasma Spraying of Refractory Materials, ITSC-92, Orlando, May 28–June 5, 1992, p 39–44
M.S. Bronet and M.I. Boulos, Particle Slip Velocities in Air Jets under Atmospheric Pressure and Soft Vacuum Conditions,Can. J. Chem. Eng., Vol 68, 1990, p 353–359
H. Takikawa, T. Sakuta, and M.I. Boulos, In-Flight Measurement of Temperature and Velocity of Tungsten Particles in an RF Plasma, 3rd Jpn. Symp. Plasma Chem., Tokyo, July 23–24, 1990
X. Chen and E. Pfender, Effect of the Knudsen Number on Heat Transfer to a Particle Immersed into a Thermal Plasma,Plasma Chem. Plasma Process., Vol 3 (No.), 1983, p 97–113
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Jiang, X.L., Tiwari, R., Gitzhofer, F. et al. On the induction plasma deposition of tungsten metal. JTST 2, 265–270 (1993). https://doi.org/10.1007/BF02650475
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DOI: https://doi.org/10.1007/BF02650475