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Microstructure analysis of ohmic contacts to GaAs

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Authors and Affiliations

  1. Microelectronics Research Laboratories, Department of Electrical Engineering, University of Colorado, 80933-7150, Colorado Springs, CO

    T. S. Kalkur (Assistant Professor) & C. Araujo (Associate Professor)

  2. Rutgers University, 08855-0909, Piscataway, NJ

    Y. C. Lu (Assistant Professor)

Authors
  1. T. S. Kalkur
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  2. Y. C. Lu
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  3. C. Araujo
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Additional information

Y. C. LU, formerly with the University of Colorado

This paper is based on a presentation made in the symposium “Interface Science and Engineering” presented during the 1988 World Materials Congress and the TMS Fall Meeting, Chicago, IL, September 26–29, 1988, under the auspices of the ASM-MSD Surfaces and Interfaces Committee and the TMS Electronic Device Materials Committee.

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Kalkur, T.S., Lu, Y.C. & Araujo, C. Microstructure analysis of ohmic contacts to GaAs. Metall Trans A 21, 2459–2463 (1990). https://doi.org/10.1007/BF02646990

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