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High-current metal ion implantation for industrial applications

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Abstract

Ion implantation, as an efficient surface processing technique, has developed to include the implantation of various metallic ions for improving not only wear properties, but also such other surface properties as solid lubrication, fatigue, chemical stability, and engineering reliability. The high-dose metal ion implantation that can be accumulated in a short time over a relatively large implanting area makes metal vapor vacuum arc (MEVVA) source ion implantation well suited to practical surface engineering modification applications.

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Authors and Affiliations

  1. Institute of Low Energy Nuclear Physics, Beijing Normal University, 100875, Beijing, China

    W. L. Lin & X. J. Ding

  2. Beijing General Research Institute of Non-Ferrous Metals, 100088, Beijing, China

    J. M. Sang, J. Xu & X. M. Yuan

Authors
  1. W. L. Lin
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  2. X. J. Ding
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  3. J. M. Sang
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  4. J. Xu
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  5. X. M. Yuan
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Lin, W.L., Ding, X.J., Sang, J.M. et al. High-current metal ion implantation for industrial applications. JMEP 3, 587–590 (1994). https://doi.org/10.1007/BF02645255

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  • DOI: https://doi.org/10.1007/BF02645255

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