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Exceptional hardness and corrosion resistance of Mo5Ru3and W3Ru2films

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Abstract

Films of MO5Ru3 and WgRu2 prepared by sputtering on hot sapphire substrates exhibit interesting properties. The films are among the hardest known electrical conductors and show Khoop hardness values comparable to sapphire. They exhibit high resistance to most common etchants (particularly acid etchants), have high scratch resistance, and have excellent adhesion to the (sapphire) substrates. The temperature coefficient of electrical resistivity can be made either negative, positive, or zero by varying the substrate deposition temperature. Reflectivity measurements from ultraviolet to infrared are also reported to assess their possible use as reflecting surfaces.

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Authors and Affiliations

  1. Bell Telephone Laboratories, 07914, Murray Hill, N. J.

    L. R. Testardi (Member of the Technical Staff), W. A. Royer (Senior Technical Aides), D. D. Bacon (Senior Technical Aides), A. R. Storm (Senior Technical Aides) & J. H. Wernick (Member of the Technical Staff)

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  1. L. R. Testardi
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  2. W. A. Royer
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  3. D. D. Bacon
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  4. A. R. Storm
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  5. J. H. Wernick
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Testardi, L.R., Royer, W.A., Bacon, D.D. et al. Exceptional hardness and corrosion resistance of Mo5Ru3and W3Ru2films. Metall Trans 4, 2195–2198 (1973). https://doi.org/10.1007/BF02643287

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  • DOI: https://doi.org/10.1007/BF02643287

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