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Measurement of the solubility of germanium in aluminum utilizing MeV He+ backscattering

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Abstract

The solubility of germanium in thin (1000 to 6000Å) aluminum films has been measured over the temperature range 120° to 390°C using the technique of MeV He+ backscattering. The results are in general agreement with previous measurements. The technique is described and its advantages and limitations for measurements of this type are discussed.

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Authors and Affiliations

  1. Customer Engineering Center, Texas Instruments Incorporated, 75222, Dallas, Texas

    J. M. Caywood (Member of Technical Staff)

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  1. J. M. Caywood
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Caywood, J.M. Measurement of the solubility of germanium in aluminum utilizing MeV He+ backscattering. Metall Trans 4, 735–743 (1973). https://doi.org/10.1007/BF02643082

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