Abstract
In this work we have studied the feasibility of integrating an infrared filter and an infrared detector by means of a flip-chip technique. This filter and detector combination should be the heart of a future gas detection cell based on infrared absorption. In our case the filter is a surface micromachined Fabry-Perot interferometer, and the infrared detector is a bulk micromachined thermopile. The flip-chip technique is an elegant solution to assure the optical micro-alignment of both devices and allows the electrical contact needed to actuate active optical filters.
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Fonseca, L., Cabruja, E., Calaza, C. et al. Feasibility of a flip-chip approach to integrate an IR filter and an IR detector in a future gas detection cell. Microsystem Technologies 10, 382–386 (2004). https://doi.org/10.1007/BF02637108
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DOI: https://doi.org/10.1007/BF02637108