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Integrated beam strain gauges

  • Mechanical Measurements
  • Published:
Measurement Techniques Aims and scope

Abstract

We consider the results of development of silicon strain-gauge transducers. We present the technical characteristics for different types of integrated silicon strain-gauge transducers.

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References

  1. L. V. Sokolov, Zarubezh. Élektron. Tekh., No. 4, 68 (1990).

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  2. J. Ash, Sensors of Measuring Systems [Russian translation], Mir, Moscow (1992).

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  3. V. N. Zimin, D. V. Shabratov, N. A. Shelepin, and Yu. A Chaply, Izmerit. Tekh. (this issue).

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Authors
  1. V. N. Zimin
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  2. N. Z. Salakhov
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  3. N. A. Shelepin
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Additional information

Translated from Izmeritel'naya Tekhnika, No. 3, pp. 36–37, March, 1994.

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Zimin, V.N., Salakhov, N.Z. & Shelepin, N.A. Integrated beam strain gauges. Meas Tech 37, 300–302 (1994). https://doi.org/10.1007/BF02614268

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  • DOI: https://doi.org/10.1007/BF02614268

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