Abstract
The article presents the results of an experimental investigation of high-temperature contact heat exchange between the polished surface of a substrate and the rough surface of a substrate holder under various conditions of contact between them in different gas media, under vacuum, and at different gas flow rates.
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Additional information
Moscow Institute of Electronic Engineering, Moscow, Russia. Translated from Inzhenerno-Fizicheskii Zhurnal, Vol. 69, No. 5, pp. 761–767, September–October, 1996.
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Samoilikov, V.K. Heat exchange between a substrate and substrate holder in thermal contact. J Eng Phys Thermophys 69, 578–584 (1996). https://doi.org/10.1007/BF02606172
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DOI: https://doi.org/10.1007/BF02606172