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Topography and angular distribution of sputtered atoms of silver target bombarded by Si n (n =1, 2) ions

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Zhenxia, W., Jisheng, P., Jiping, Z. et al. Topography and angular distribution of sputtered atoms of silver target bombarded by Si n (n =1, 2) ions. J Mater Sci Lett 14, 33–34 (1995). https://doi.org/10.1007/BF02565278

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  • DOI: https://doi.org/10.1007/BF02565278

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