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Determination of chlorine distribution in silicon dioxide by neutron activation

  • Application to Microelectronics and Solid State Physics
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Abstract

A neutron activation method for the determination of chlorine distribution in silicon dioxide on the surface of Si wafers has been developed. After irradiation of the sample with a standard, successive layers are removed from the oxide surface by chemical etching and the chlorine content in the solutions obtained is determined gamma-spectrometrically. Using a Ge(Li) detector, a lower limit of determination of 1.0·10−7 g was obtained. This limit can be improved by using a NaI(Tl) detector. The error of chlorine determination is discussed.

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References

  1. A. V. NIKOLAEV, N. GILBERT, M. M. GOLDSHTEIN, I. G. YUDELEVICH, Izv. Sib. Otd. Ak. N. SSSR, No. 14, 1977.

  2. W. A. PLISKIN, H. S. LEHMAN, J. Electrochem. Soc., 112 (1965) 1013.

    Article  CAS  Google Scholar 

  3. W. RATYŃSKI, A. STEGNER, Z. SUJKOWSKI, IAEA-SM-170/17, 1973.

  4. L. A. CURRIE, Anal. Chem., 40 (1968) 586.

    Article  CAS  Google Scholar 

  5. J. W. MAYER, L. ERIKSSON, J. A. DAVIES, Ion Implantation in Semiconductors, Academic Press, New York, London, 1970.

    Google Scholar 

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Authors and Affiliations

  1. Department of Nuclear Methods of Material Engineering, Institute of Nuclear Research, Warszawa PRL-03-195, Warsaw, Poland

    L. Rowińska, H. Jaskólska, W. Wroński & L. Waliś

Authors
  1. L. Rowińska
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  2. H. Jaskólska
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  3. W. Wroński
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  4. L. Waliś
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Rowińska, L., Jaskólska, H., Wroński, W. et al. Determination of chlorine distribution in silicon dioxide by neutron activation. J. Radioanal. Chem. 58, 189–194 (1980). https://doi.org/10.1007/BF02533787

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  • DOI: https://doi.org/10.1007/BF02533787

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