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Contribution of activation analysis with low energy charged particles to studies on GaAs

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Abstract

It is shown that the instrumental analysis of carbon and oxygen in GaAs, at trace level, can be achieved by irradiation with low energy deuterons and tritons (3 MeV). The experimental sensitivities are 6 ppb/weight for the16O( 31 H,n)18F reaction and 25 ppb/weight for the12C( 21 H,n)13N reaction. Applications related to the metallurgy of GaAs are described.

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Authors and Affiliations

  1. CNRS-Groupe “Application des Réactions Nucléaires à l'Analyse Chimique”, 3A, rue de la Férollerie, 45045, Orleans Cedex, France

    M. Valladon, G. Blondiaux, C. Koemmerer & J. L. Debrun

  2. LEP, 3, avenue Descartes, 94450, Limeil-Brevannes, France

    J. Hallais

  3. La Radiotechnique Compelec, RTC, BP 6025, 14001, Caen, France

    G. Poiblaud

  4. THOMSON CSF 91, Corbeville, France

    A. Huber

Authors
  1. M. Valladon
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  2. G. Blondiaux
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  3. C. Koemmerer
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  4. J. Hallais
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  5. G. Poiblaud
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  6. A. Huber
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  7. J. L. Debrun
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Valladon, M., Blondiaux, G., Koemmerer, C. et al. Contribution of activation analysis with low energy charged particles to studies on GaAs. J. Radioanal. Chem. 58, 165–172 (1980). https://doi.org/10.1007/BF02533784

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  • DOI: https://doi.org/10.1007/BF02533784

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