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Recent improvements of the ion analyzer and typical examples of applications

  • Microtechniques
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Abstract

Improvements of a CAMECA IMS 300 ion microanalyzer are described: ion source, resolution, ion detector and counting system. Comparison with the performances of an electron microprobe is presented. Examples of application are given.

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Authors and Affiliations

  1. CAMECA, Corbevoie, France

    J. M. Rouberol, Ph. Basseville & J. -P. Lenoir

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  1. J. M. Rouberol
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  2. Ph. Basseville
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  3. J. -P. Lenoir
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Rouberol, J.M., Basseville, P. & Lenoir, J.P. Recent improvements of the ion analyzer and typical examples of applications. J. Radioanal. Chem. 12, 59–67 (1972). https://doi.org/10.1007/BF02520975

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  • DOI: https://doi.org/10.1007/BF02520975

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