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Charged-particle activation analysis studies on carbon, nitrogen and oxygen mainly in semiconductor silicon

  • Charged-particle and Photon Activation Analysis
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Abstract

High utility value of charged-particle activation analysis is exemplified by the study on carbon, nitrogen and oxygen in semiconductor silicon. A summary of the present authors' works is shown, and the equilibrium of carbon and oxygen in a silicon melt with ambient carbon monoxide is discussed. Also, a note is given about the chemical separation of18F for the3He activation analysis of various matrices.

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References

  1. T. NOZAKI, Y. YATSURUGI, N. AKIYAMA, J. Radioanal. Chem., 4 (1970) 87.

    Article  CAS  Google Scholar 

  2. T. NOZAKI, Y. YATSURUGI, N. AKIYAMA, J. Electrochem. Soc., 117 (1970) 1566.

    CAS  Google Scholar 

  3. Y. YATSURUGI, N. AKIYAMA, Y. ENDO, T. NOZAKI, J. Electrochem. Soc., 120 (1973) 975.

    CAS  Google Scholar 

  4. Y. ENDO, Y. YATSURUGI, N. AKIYAMA, T. NOZAKI, Anal. Chem., 44 (1972) 2228.

    Article  Google Scholar 

  5. T. NOZAKI, Y. MAKIDE, Y. YATSURUGI, Y. ENDO, N. AKIYAMA, Bull. Chem. Soc. Japan, 45 (1972) 2776.

    Article  CAS  Google Scholar 

  6. T. NOZAKI, Y. YATSURUGI, N. AKIYAMA, Y. ENDO, Y. MAKIDE, J. Radioanal. Chem., 19 (1974) 109.

    Article  CAS  Google Scholar 

  7. N. AKIYAMA, Y. YATSURUGI, Y. ENDO, Z. IMAYOSHI, T. NOZAKI, Appl. Phys. Letters, 22 (1973) 630.

    Article  CAS  Google Scholar 

  8. T. NOZAKI, Y. MAKIDE, Y. YATSURUGI, N. AKIYAMA, Y. ENDO, Int. J. Appl. Radiat. Isotopes, 22 (1971) 607.

    Article  CAS  Google Scholar 

  9. E.g., O. KUBASCHEWSKI, E. LI. EVANS, C. B. ALCOCK, Metallurgical Thermochemistry, Pergamon, Oxford, 1967, p. 226; JANAF Thermochemical Tables, compiled by D. R. STULL et al., distributed from Clearinghouse, USA 1965–1967.

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Authors and Affiliations

  1. Institute of Physical and Chemical Research, Wako-shi, Saitama, (Japan)

    T. Nozaki

  2. Komatsu Electronic Metals Co., Shinomiya, Hiratsuka, (Japan)

    Y. Yatsurugi & Y. Endo

Authors
  1. T. Nozaki
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  2. Y. Yatsurugi
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  3. Y. Endo
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Nozaki, T., Yatsurugi, Y. & Endo, Y. Charged-particle activation analysis studies on carbon, nitrogen and oxygen mainly in semiconductor silicon. J. Radioanal. Chem. 32, 43–50 (1976). https://doi.org/10.1007/BF02517739

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  • DOI: https://doi.org/10.1007/BF02517739

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