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Measurement Techniques

, Volume 42, Issue 7, pp 673–679 | Cite as

A systems approach to vacuum measurement methods

  • V. V. Kuz’min
Mechanical Measurements
  • 21 Downloads

Abstract

A general approach is presented to the methodological principles of vacuum metrology: methods of reproducing low-pressure scales and methods of calibrating and checking vacuum gauges and flow meters. This provides a scientific basis for classifying methods and identifying working resources on the basis of gas-dynamic formulas.

Keywords

Hydrogen Sulfide Saturation Vapor Pressure Vacuum Gauge Reduce Flow Rate Calibration Chamber 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Kluwer Academic/Plenum Publishers 1999

Authors and Affiliations

  • V. V. Kuz’min

There are no affiliations available

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