Abstract
A method is proposed for certifying the base of interference goniometers and determining the nonlinearity of their readings. It is shown that the error of certification of the base of the instrument is no greater than 0.06 μm.
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Translated from Izmeritel'naya Tekhnika, No. 5, pp. 17–19, May, 1998.
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Lizunov, V.D., Kopytov, V.V. Method of improving the accuracy of measurement of a plane angle by interference goniometers. Meas Tech 41, 417–420 (1998). https://doi.org/10.1007/BF02506614
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DOI: https://doi.org/10.1007/BF02506614