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On the design of microelectronic water and gas flowmeters—Sensors of a new generation

  • Mechanical Measurements
  • Published:
Measurement Techniques Aims and scope

Abstract

We consider the sources of reduced accuracy in pressure microsensors and ways to eliminate them. We present theoretical calculations that make it possible to increase accuracy with our method. We also consider the technology for producing and designing microsensors.

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References

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Authors
  1. É. L. Egiazaryan
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Additional information

Translated from Izmeritel'naya Tekhnika, No. 10, pp. 15–18, October, 1997.

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Egiazaryan, É.L. On the design of microelectronic water and gas flowmeters—Sensors of a new generation. Meas Tech 40, 940–945 (1997). https://doi.org/10.1007/BF02505106

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  • DOI: https://doi.org/10.1007/BF02505106

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