Abstract
The optical train of an interferometer to certify small-scale measures in the range 1–200 μm with a high-resolution modulation optical microscope for sighting the lines on the measure is described. The circuit of a interference-fringe recording unit is presented. Some results of line scale measurements are reported.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
D. J. Whitehouse, Meas. Contr.,24, No. 2, 37 (1991).
L. Yu. Abramova et al., Izmerit. Tekh., No. 3, 30 (1994).
Additional information
Translated from Izmeritel'naya Tekhnika, No 9, pp 27–29, September, 1997
Rights and permissions
About this article
Cite this article
Abramova, L.Y., Baratov, V.M., Fedorin, V.L. et al. Laser interferometer with a high-resolution optical microscope for measuring small line scales. Meas Tech 40, 852–855 (1997). https://doi.org/10.1007/BF02504491
Issue Date:
DOI: https://doi.org/10.1007/BF02504491