Abstract
Establishing a standard methodology for the design of microsensors is a fairly formidable task, in light of the wide range of design and fabrication methods that exist. These methods differ in particular in the material and method of production of the sensing element. An integrated method of microsensor design is presented in this article on the basis of an analysis of the literature data and special experiments conducted for that purpose.
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Additional information
Translated from Izmeritel'naya Tekhnika, No. 12, pp. 20–22, December, 1997.
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Egiazaryan, É.L. Design of microsensors for pressure measurement. Meas Tech 40, 1163–1166 (1997). https://doi.org/10.1007/BF02504159
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DOI: https://doi.org/10.1007/BF02504159