Measurement Techniques

, Volume 40, Issue 2, pp 130–134 | Cite as

Precise measurements of small gas flows—metrological basis for the calibration of leak detectors

  • V. V. Kuz'min
Mechanical Measurements


This article discusses technical aspects of the calibration of leak detectors by using a series of artificial control flows. Results are presented from the calibration of several mass-spectrometric leak detectors. Procedures and methods of analyzing measurements obtained in the calibration of such flows are discussed, and several approaches to the metrological certification of halogen and electron-capture leak detectors are described.


Control Flow Artificial Flow Metrological Characteristic Leak Detector Inlet Valve 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.


  1. 1.
    G. N. Peggs, Vacuum,26, August, 321 (1976).CrossRefGoogle Scholar
  2. 2.
    V. V. Kuz'min, Vacuum Measurements [in Russian], Izd. Standartov (1992), p. 176.Google Scholar
  3. 3.
    V. V. Kuz'min, Izmeren. Kontr. Avtomat., No. 2(78), 53 (1991).Google Scholar
  4. 4.
    V. V. Kuz'min, Defektoskopiya, No. 3, 69 (1990).Google Scholar
  5. 5.
    V. V. Kuz'min, Izmer. Tekh., No. 5, 34 (1990).MathSciNetGoogle Scholar
  6. 6.
    W. Jitschin, G. Grosse, and D. Wandrey, Vacuum,38, Aug./Oct., 883 (1988).CrossRefGoogle Scholar
  7. 7.
    L. Rubet, Le Vide,38, No. 215, 21 (1983).Google Scholar
  8. 8.
    V. V. Kuz'min, Izmer. Tekh., No. 11, 41 (1988).Google Scholar
  9. 9.
    C. D. Ehrlich et al., J. Vac. Sci. Technol.,A8, Nov./Dec., 4086 (1990).ADSGoogle Scholar

Copyright information

© Plenum Publishing Corporation 1997

Authors and Affiliations

  • V. V. Kuz'min

There are no affiliations available

Personalised recommendations