Precise measurements of small gas flows—metrological basis for the calibration of leak detectors
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This article discusses technical aspects of the calibration of leak detectors by using a series of artificial control flows. Results are presented from the calibration of several mass-spectrometric leak detectors. Procedures and methods of analyzing measurements obtained in the calibration of such flows are discussed, and several approaches to the metrological certification of halogen and electron-capture leak detectors are described.
KeywordsControl Flow Artificial Flow Metrological Characteristic Leak Detector Inlet Valve
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