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Analysis of methods of attaching a semiconductor sensor to the substrate

  • Mechanical Measurements
  • Published:
Measurement Techniques Aims and scope

Abstract

It is shown that correct selection of the method used to attach the sensor (SR) of a microtransducer to the frame (substrate) of the latter is an important element in sensor design and fabrication. Microtransducers for measuring pressure are used as an example in an analysis of methods of attaching semiconductor SRs to the substrate of the transducer.

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References

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Authors
  1. E. L. Egiazaryan
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Additional information

Translated from Izmeritel'naya Tekhnika, No. 12, pp. 27–30, December, 1998.

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Egiazaryan, E.L. Analysis of methods of attaching a semiconductor sensor to the substrate. Meas Tech 41, 1128–1132 (1998). https://doi.org/10.1007/BF02503831

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  • DOI: https://doi.org/10.1007/BF02503831

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