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Measurement of average power of excimer-laser radiation

  • Optophysical Measurements
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Measurement Techniques Aims and scope

Abstract

Measurement of the average power of laser radiation in the ultraviolet region is examined. The characteristics of working and standard instruments are presented.

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References

  1. G. A. Abil'siitov, et al.,Process lasers: A Handbook in 2 Volumes, Vol. 1, Design and Operation [in Russian], Mashinostroenie, Moscow (1991).

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  3. GOST 8.275-91, State System for Measurement Uniformity, State Primary Standard and All-Union Verification Scheme for Instruments for Measurement of Energy and Average Power of Laser Radiation in the Range of 0.3–12.0 μm.

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Authors
  1. M. L. Kozachenko
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Additional information

Translated from Izmeritel'naya Tekhnika, No. 7, pp. 28–30, July, 2000.

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Kozachenko, M.L. Measurement of average power of excimer-laser radiation. Meas Tech 43, 594–597 (2000). https://doi.org/10.1007/BF02503594

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  • DOI: https://doi.org/10.1007/BF02503594

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