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Study of metrological characteristics of microsensor elements attached by adhesives and glasses

  • Mechanical Measurements
  • Published:
Measurement Techniques Aims and scope

Abstract

Results of experimental studies of the metrological characteristics of pressure microsensors are presented for various methods of attachment by various adhesive compositions and other materials. Tests were performed under various, rather severe operating conditions. Methods are described that allow designers to optimize fabrication technology.

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Authors
  1. É. L. Egiazaryan
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Translated from Izmeritel'naya Tekhnika, No. 2, pp. 28–32, February, 2000.

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Egiazaryan, É.L. Study of metrological characteristics of microsensor elements attached by adhesives and glasses. Meas Tech 43, 134–139 (2000). https://doi.org/10.1007/BF02503574

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  • DOI: https://doi.org/10.1007/BF02503574

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