Measurement Techniques

, Volume 43, Issue 2, pp 134–139 | Cite as

Study of metrological characteristics of microsensor elements attached by adhesives and glasses

  • É. L. Egiazaryan
Mechanical Measurements


Results of experimental studies of the metrological characteristics of pressure microsensors are presented for various methods of attachment by various adhesive compositions and other materials. Tests were performed under various, rather severe operating conditions. Methods are described that allow designers to optimize fabrication technology.


Metrological Characteristic Sense Element Gold Wire Liquid Glass Calibration Characteristic 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


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Copyright information

© Kluwer Academic/Plenum Publishers 2000

Authors and Affiliations

  • É. L. Egiazaryan

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