Measurement Techniques

, Volume 43, Issue 2, pp 134–139 | Cite as

Study of metrological characteristics of microsensor elements attached by adhesives and glasses

  • É. L. Egiazaryan
Mechanical Measurements
  • 16 Downloads

Abstract

Results of experimental studies of the metrological characteristics of pressure microsensors are presented for various methods of attachment by various adhesive compositions and other materials. Tests were performed under various, rather severe operating conditions. Methods are described that allow designers to optimize fabrication technology.

Keywords

Metrological Characteristic Sense Element Gold Wire Liquid Glass Calibration Characteristic 

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Copyright information

© Kluwer Academic/Plenum Publishers 2000

Authors and Affiliations

  • É. L. Egiazaryan

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