Abstract
Pyrolysis of trichlorosilane (TCS) and copyrolysis of TCS with 1,3-butadiene were studied. The enthalpies and activation energies for the reactions of the products of TCS pyrolysis were found by quantum-chemical calculations. A direct study of the pyrolysis of TCS by mass spectrometry was carried out. Based on the thermochemical parameters found by quantum-chemical calculations and on the results of GLC and mass spectrometry concerning the composition of the pyrolysis products, it was concluded that the pyrolysis of TCS follows a scheme that includes formation of radicals and silylenes.
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Translated fromIzvestiya Akademii Nauk. Seriya Khimicheskaya, No. 9, pp. 1659–1662, September, 1997.
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Chernyshev, E.A., Krasnova, T.L., Abramova, E.S. et al. Experimental and theoretical study of the pyrolysis of trichlorosilane. Russ Chem Bull 46, 1582–1585 (1997). https://doi.org/10.1007/BF02502944
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DOI: https://doi.org/10.1007/BF02502944