Summary
A new hydrogen sensor is here presented, based on the use of horizontally polarized surface transverse waves (STW). The use of these waves for application to chemical sensors seems attractive because of the possibility of controlling their penetration depth into the substrate and thus increasing the sensitivity of the device. Preliminary experiments, performed on a ST-cut quartz substrate, have shown how the response of the device strongly increases with the STW energy trapping in the sensitive Pd film.
References
H. Wohltjen andR. Dessy:Anal. Chem.,51, 1458 (1979).
A. Briant, D. L. Lee andJ. F. Vetelino:A surface acoustic wave gas detector, inProceedings of the 1981 IEEE Ultrasonic Symposium, p. 171.
A. D'Amico, A. Palma andE. Verona:Sensors and Actuators,3, 31 (1982).
A. D'Amico, A. Palma andE. Verona:Appl. Phys. Lett.,41, 300 (1982).
A. D'Amico, A. Palma andE. Verona:Hydrogen sensor using a palladium coated surface acoustic wave delay line, inProceedings of the 1982 IEEE Ultrasonic Symposium (IEEE New York, N.Y., 1982).
H. Wohltjen:Sensor and Actuators,5, 307 (1984).
A. W. Barendsz, J. C. Wis, M. S. Nieuwenhuizen, E. Nieuwkoop, M. J. Vellekoop andW. J. J. Ghijsen:A SAW chemosensor for NO2 gas concentration measurement, inProceedings of the 1985 IEEE Ultrasonic Symposium, p. 586.
S. G. Joschi andJ. G. Brace:Measurement of humidity using surface acoustic waves, inProceedings of the 1985 IEEE Ultrasonic Symposium, p. 600.
S. J. Martin, A. J. Ricco, D. S. Ginley andT. E. Zippezian:Isothermal measurements thermal disorption of organic vapours using SAW devices, inIEEE Trans. on Ultrasonics, Ferroelectrics and Frequency Control, UFFC-34 (1987), p. 143.
A. Venema, E. Nieuwkoop, M. J. Vellekoop, W. J. Ghljsen, A. W. Barendsz andM. S. Nieuwenhuizen: NO2 gas concentration measurement with a SAW chemosensor, inIEEE Trans. on Ultrasonics, Ferroelectrics and Frequency Control, UFFC-34 (1987), p. 149.
J. F. Vetelino, R. K. Lade andR. S. Falconer:Hydrogen sulfide surface acoustic wave gas detector, inIEEE Trans. on Ultrasonics, Ferroelectrics and Frequency Control, UFFC-34 (1987), p. 157.
H. Wohltjen, A. W. Snow, W. R. Barger andD. S. Ballantin:Trace chemical vapor detection using SAW delay line oscillators, inIEEE Trans. on Ultrasonics, Ferroelectrics and Frequency Control, UFFC-34, (1987), p. 172.
A. D'Amico, A. Petri, P. Verardi andE. Verona: NH3 surface acoustic wave gas
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Anisimkin, V.I., Verona, E. & D'Amico, A. Hydrogen detection with surface acoustic transverse waves. Il Nuovo Cimento D 11, 503–508 (1989). https://doi.org/10.1007/BF02450998
Received:
Issue Date:
DOI: https://doi.org/10.1007/BF02450998