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Journal of Sol-Gel Science and Technology

, Volume 8, Issue 1–3, pp 243–248 | Cite as

Influence of solvent concentration on the microstructure of SiO2−TiO2 sol-gel films

  • Xavier Orignac
  • H. C. Vasconcelos
  • X. M. Du
  • R. M. Almeida
Article

Abstract

Spin-coating is one of the possible methodsfor the fabrication of optical planar waveguides. These have several applications in integrated optical devices, provided that their optical losses are below ≈1 dB/cm. The attenuation is caused in part by surface and bulk scattering. The latter depends on the microstructure of the films and, more particularly, the porosity, which is studied here. A series of SiO2−TiO2 films were prepared from solutions containing different concentrations of ethanol. The influence of the ethanol/(Si+Ti)alkoxides volume ratio on the porosity was investigated by Ellipsometry, Infrared Spectroscopy, and Scanning Electron Microscopy. The porosity volume fraction was found to reach a minimum when the ethanol volume ratio is near 4.

Keywords

ethanol porosity scattering sol-gel films waveguides 

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Copyright information

© Kluwer Academic Publishers 1997

Authors and Affiliations

  • Xavier Orignac
    • 1
  • H. C. Vasconcelos
    • 1
  • X. M. Du
    • 1
  • R. M. Almeida
    • 1
  1. 1.Instituto de Engenharia de Sistemas e ComputadoresLisboaPortugal

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