Annealing behaviour of iron implanted zirconia
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A zirconia film was implanted at room temperature with 100 keV57Fe+ to a fluence of 8×1016 ions/cm2. The analysis of the Conversion Electron Mössbauer spectra shows that iron is distributed among different charge states: Fe0 (in a form of small and large metallic iron aggregates) Fe2+ and Fe4+. The evolution of the iron depth profile deduced from Rutherford backscattering measurements as well as the change in the charge states of iron as a function of annealing under argon atmosphere are presented.
KeywordsIron Atmosphere Thin Film Zirconia Argon
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