Abstract
Performance of an X-ray preionised XeCl excimer laser is presented, a maximum output of 30 W (1.2 J/25 Hz) has been obtained. This laser was applied in laser semiconductor processing, laser deposition and laser photolithography.
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Qihong, L. X-ray preionised excimer laser and its applications. Hyperfine Interact 37, 275–290 (1987). https://doi.org/10.1007/BF02395714
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DOI: https://doi.org/10.1007/BF02395714