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Journal of Materials Science

, Volume 26, Issue 23, pp 6419–6422 | Cite as

High gas sensitivity of tin oxide ultrathin films deposited on glasses and alumina substrates

  • Takeyuki Suzuki
  • Tsutomu Yamazaki
  • Kazuo Hayashi
  • Tatsuo Noma
Papers

Abstract

Tin oxide ultrathin films were deposited on optically flat Pyrex glass, optically flat quartz glass and sintered alumina substrates by the ion-beam sputtering method. Films with thickness varying from about 1 to 500 nm were annealed in air at 500 °C for 50 h. The gas sensing properties of these films were investigated at 300 °C against synthetic air containing 0.5% hydrogen. A small substrate dependence of sensor behaviour was observed; however, an overwhelmingly important thickness dependence occurred in all substrates tried. Sensitivities higher than ∼104 or 105 were obtained in films in a narrow thickness range of about 3 to 20 nm, and films thicker or thinner than this were relatively insensitive.

Keywords

Quartz Glass Alumina Substrate Substrate Dependence Pyrex Glass Thickness Range 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Chapman & Hall 1991

Authors and Affiliations

  • Takeyuki Suzuki
    • 1
  • Tsutomu Yamazaki
    • 1
  • Kazuo Hayashi
    • 1
  • Tatsuo Noma
    • 1
  1. 1.Department of Applied Chemistry, Faculty of TechnologyTokyo University of Agriculture and TechnologyTokyoJapan

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