High gas sensitivity of tin oxide ultrathin films deposited on glasses and alumina substrates
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Tin oxide ultrathin films were deposited on optically flat Pyrex glass, optically flat quartz glass and sintered alumina substrates by the ion-beam sputtering method. Films with thickness varying from about 1 to 500 nm were annealed in air at 500 °C for 50 h. The gas sensing properties of these films were investigated at 300 °C against synthetic air containing 0.5% hydrogen. A small substrate dependence of sensor behaviour was observed; however, an overwhelmingly important thickness dependence occurred in all substrates tried. Sensitivities higher than ∼104 or 105 were obtained in films in a narrow thickness range of about 3 to 20 nm, and films thicker or thinner than this were relatively insensitive.
KeywordsQuartz Glass Alumina Substrate Substrate Dependence Pyrex Glass Thickness Range
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