Abstract
Czochralski grown silicon annealed at 750° C has been investigated with high-resolution electron microscopy, Hall effect and infrared measurement. Crystalline plate-like precipitates were observed and identified asβ-cristobalite. The structure of the coherent interface of the new phase and its connection with the origin of the new donor are discussed.
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Xiao, Z.G., Lin, X.W., Liu, G.Z. et al. Crystalline plate-like SiO2 precipitates in silicon and their relation with new donors. J Mater Sci 24, 3573–3576 (1989). https://doi.org/10.1007/BF02385742
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DOI: https://doi.org/10.1007/BF02385742