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Chemical vapour deposition of epitaxial Ni-Zn ferrite films by thermal decomposition of acetylacetonato complexes

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Abstract

Epitaxial (Ni, Zn)Fe2O4 films were prepared on (100) MgO single crystal substrate by lowpressure chemical vapour deposition using a thermal decomposition of acetylacetonatocomplexes, Ni(acac)2, Zn(acac)2 and Fe(acac)3. These complexes were evaporated at 157, 79 and 146° C, respectively, and transported with nitrogen carrier gas (flow rate 100 ml min−1) to the deposition furnace. Polycrystalline and epitaxial films were grown at 500 to 600 and 600 to 650° C, respectively, under a pressure of 12 torr. The epitaxial film of Ni1−xZnxFe2O4 (x⋍0.4) treated at 600° C for 60 min, showed the saturation magnetization of 67 e.m.u. g−1 and the coercive force of 20 to 30 Oe.

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Itoh, H., Uemura, T., Yamaguchi, H. et al. Chemical vapour deposition of epitaxial Ni-Zn ferrite films by thermal decomposition of acetylacetonato complexes. J Mater Sci 24, 3549–3552 (1989). https://doi.org/10.1007/BF02385738

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  • DOI: https://doi.org/10.1007/BF02385738

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