Chemical vapour deposition of epitaxial Ni-Zn ferrite films by thermal decomposition of acetylacetonato complexes
- 73 Downloads
Epitaxial (Ni, Zn)Fe2O4 films were prepared on (100) MgO single crystal substrate by lowpressure chemical vapour deposition using a thermal decomposition of acetylacetonatocomplexes, Ni(acac)2, Zn(acac)2 and Fe(acac)3. These complexes were evaporated at 157, 79 and 146° C, respectively, and transported with nitrogen carrier gas (flow rate 100 ml min−1) to the deposition furnace. Polycrystalline and epitaxial films were grown at 500 to 600 and 600 to 650° C, respectively, under a pressure of 12 torr. The epitaxial film of Ni1−xZnxFe2O4 (x⋍0.4) treated at 600° C for 60 min, showed the saturation magnetization of 67 e.m.u. g−1 and the coercive force of 20 to 30 Oe.
KeywordsFerrite Fe2O4 Thermal Decomposition Chemical Vapour Deposition Acac
Unable to display preview. Download preview PDF.
- 1.H. ITOH, T. TAKEDA and S. NAKA,J. Mater. Sci. 21 (1986) 3677.Google Scholar
- 2.E. HIROTA, K. HIROTA and K. KUGIMIYA, in Proceedings of the 3rd International Conference on Ferrites, Tokyo, September 1980 (Centre for Academic Publications, Tokyo, 1981) p. 667.Google Scholar
- 3.J. P. LAZZARI —ibid. p. 695.Google Scholar
- 4.H. ITOH, H. YAMAGUCHI and S. NAKA,Yogyo-Kyokai-Shi (J. Ceram. Soc. Jpn) 95 (1987) 50.Google Scholar
- 5.Idem, Nippon Kagaku Kaishi (J. Chem. Soc. Jpn.) (1987) 2004.Google Scholar
- 6.R. S. TEBBLE and D. J. CRAIK, “Magnetic Materials” (Wiley Interscience, New York, 1969).Google Scholar
- 7.K. J. STANDLEY, “Oxide Magnetic Materials” (Clarendon, Oxford, 1972).Google Scholar