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Journal of Materials Science

, Volume 24, Issue 10, pp 3549–3552 | Cite as

Chemical vapour deposition of epitaxial Ni-Zn ferrite films by thermal decomposition of acetylacetonato complexes

  • Hideaki Itoh
  • Toshiya Uemura
  • Hirofumi Yamaguchi
  • Shigeharu Naka
Review

Abstract

Epitaxial (Ni, Zn)Fe2O4 films were prepared on (100) MgO single crystal substrate by lowpressure chemical vapour deposition using a thermal decomposition of acetylacetonatocomplexes, Ni(acac)2, Zn(acac)2 and Fe(acac)3. These complexes were evaporated at 157, 79 and 146° C, respectively, and transported with nitrogen carrier gas (flow rate 100 ml min−1) to the deposition furnace. Polycrystalline and epitaxial films were grown at 500 to 600 and 600 to 650° C, respectively, under a pressure of 12 torr. The epitaxial film of Ni1−xZnxFe2O4 (x⋍0.4) treated at 600° C for 60 min, showed the saturation magnetization of 67 e.m.u. g−1 and the coercive force of 20 to 30 Oe.

Keywords

Ferrite Fe2O4 Thermal Decomposition Chemical Vapour Deposition Acac 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Chapman and Hall Ltd. 1989

Authors and Affiliations

  • Hideaki Itoh
    • 1
  • Toshiya Uemura
    • 1
  • Hirofumi Yamaguchi
    • 1
  • Shigeharu Naka
    • 1
  1. 1.Synthetic Crystal Research Laboratory, Faculty of EngineeringNagoya UniversityNagoyaJapan

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