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Aspects of monitoring the thickness of multicomponent coatings by x-ray methods

  • Linear and Angular Measurements
  • Published:
Measurement Techniques Aims and scope

Abstract

This article examines the measurement of the thickness of multicomponent coatings with the use of back-scattered low-energy x-rays. It is found that fluctuations in the composition of the coating affect the thickness measurement due to a change in the absorptivity of the coating material when an element of the substrate is measured on the basis of back-scattered or fluorescent radiation. The measurements are also influenced by the mutual effect of the elements of the coating on the radiation leaving the coating.

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References

  1. V. A. Zabrodskii, Use of Back-Scattered X-Radiation in Industry [in Russian], Energoatomizdat, Moscow (1989).

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  2. A. Zabrodskii and O. A. Sidulenko, USSR Authors' Certificate No. 1,160,239; Otkrytiya Izobreteniya, No. 21 (1985).

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Authors
  1. V. S. Parnasov
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Additional information

Translated from Izmeritel'naya Tekhnika, No. 5, pp. 20–22, May, 1996.

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Parnasov, V.S. Aspects of monitoring the thickness of multicomponent coatings by x-ray methods. Meas Tech 39, 491–496 (1996). https://doi.org/10.1007/BF02375756

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  • DOI: https://doi.org/10.1007/BF02375756

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