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Microstructure of SiC thin films produced on graphite by excimer-laser chemical vapour deposition

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Journal of Materials Science Letters

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References

  1. T. Taguchi, Y. Kameda, H. Kushida, K. Toyoda andS. Tanaka,Rev. Laser Engng 17 (1989) 211.

    CAS  Google Scholar 

  2. A. Yamada, J. Kenne, M. Konagai andK. Takahashi,Appl. Phys. Lett. 46 (1985) 272.

    CAS  Google Scholar 

  3. T. Noda, H. Suzuki, H. Araki, F. Abe andM. Okada,J. Mater. Sci. 11 (1992) 477.

    CAS  Google Scholar 

  4. D. N. Belton andS. J. Schmieg,J. Vacuum Sci. Technol. A8 (1990) 2353.

    Google Scholar 

  5. Y. Onuma, K. Kamimura, Y. Nagura, K. Koike andS. Yonekubo, in “Amorphous and crystalline silicon carbide III”, edited by G. L. Harris, M. G. Spencer and C. Y. Yang (Springer-Verlag, Berlin, 1992) p. 69.

    Google Scholar 

  6. G. Lucovsky, S. Y. Lin, P. D. Richard, S. S. Chao, Y. Takagi, P. Pai, J. E. Keem andJ. E. Tyler,J. Non-Cryst. Solids 75 (1985) 429.

    CAS  Google Scholar 

  7. W. G. Spizer, D. A. Kleinman andC. J. Frosch,Phys. Rev. 113 (1959) 133.

    Google Scholar 

  8. H. Okumura, E. Sakuma, J. H. Lee, H. Mukaida, S. Misawa, K. Endo andS. Yoshida,J. Appl. Phys. 61 (1987) 1134.

    CAS  Google Scholar 

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Suzuki, H., Araki, H. & Nova, T. Microstructure of SiC thin films produced on graphite by excimer-laser chemical vapour deposition. J Mater Sci Lett 13, 49–52 (1994). https://doi.org/10.1007/BF02352917

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  • DOI: https://doi.org/10.1007/BF02352917

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