Skip to main content
SpringerLink
Log in

Silica coating of aluminium nitride particles by radio-frequency plasma chemical vapour deposition

  • Published:
Journal of Materials Science Letters

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

References

  1. H. Utsugi, A. Endo, N. Suzuki andK. Ono,Nippon Kagaku Kaishi 1985 (1985) 1265.

    Google Scholar 

  2. P. Bowen, J. G. Highfield, A. Mocellin andT. A. Ring,J. Amer. Ceram. Soc. 73 (1990) 724.

    Article  CAS  Google Scholar 

  3. M. Egashira, Y. Shimizu andS. Takatsuki,J. Mater. Sci. Lett. 10 (1991) 994.

    Article  CAS  Google Scholar 

  4. A. Abid, R. Bensalem andB. J. Sealy,J. Mater. Sci. 21 (1986) 1301.

    Article  CAS  Google Scholar 

  5. Y. Shimizu, S. Takatsuki andM. Egashira,Res. Rep. Nagasaki Univ. 19 (1989) 87.

    CAS  Google Scholar 

  6. Y. Toda andA. Kato,Ceram. Int. 15 (1989) 161.

    Article  CAS  Google Scholar 

  7. H. Tada, K. Miyata, H. Yoshida andH. Kawarada,Shikizaki 61 (1988) 665.

    CAS  Google Scholar 

  8. S. Nguyen, D. Dobuzinsky, D. Harmon, R. Gleason andS. Fridmann,J. Electrochem. Soc. 137 (1990) 2209.

    CAS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Department of Chemical Science and Technology, Kyushu University, 6-10-1, Hakozaki, Higashi-ku, 812, Fukuoka, Japan

    K. Tsugeki, S. Yan, H. Maeda, K. Kusakabe & S. Morooka

Authors
  1. K. Tsugeki
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. S. Yan
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. H. Maeda
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. K. Kusakabe
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. S. Morooka
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Tsugeki, K., Yan, S., Maeda, H. et al. Silica coating of aluminium nitride particles by radio-frequency plasma chemical vapour deposition. J Mater Sci Lett 13, 43–45 (1994). https://doi.org/10.1007/BF02352915

Download citation

  • Received:

  • Accepted:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF02352915

Keywords

Search

Navigation