Summary
On each side of a thin diaphragm, separating two chambers, a condenserplate is mounted at a small distance. The two capacities thus formed are part of a bridge circuit which is fed by a high frequency oscillator. An amplifier with a narrow bandwidth, a rectifier and a micro-ammeter are used as a null-indicator. At one side of the diaphragm a pressure prevails, much lower than the pressure to be measured, at the other side the gas is admitted the pressure of which is to be measured. The displacement of the membrane by the gas pressure is compensated electrostatically of the membrane by the gas pressure is compensated electrostatically by the aid of a calibrated potentiometer. The reading of this potentiometer is a linear measure for the pressure as a result of the differential way of compensating. The range is from 10−5 — 1 mm of mercury pressure difference at any absolute value. The apparatus is made of chemically fairly resistant materials, and its indication is in principle independent of the nature of the gas, so that it can be used for almost every gas.
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References
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Opstelten, J.J., Warmoltz, N. A double-sided micromanometer. Appl. Sci. Res. 4, 329–336 (1955). https://doi.org/10.1007/BF02316498
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DOI: https://doi.org/10.1007/BF02316498