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Determination of residual impurities in InP grown by the Czochralski method, using charged particle activation analysis

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Abstract

InP samples were analyzed by charged particle activation analysis. Proton activation at 12 MeV permits the nondestructive survey of 30 elements. The main impurities are Ti, Fe, Ga and Zn (1015 to 2·1016 at/cm3). Oxygen was analyzed separately by triton activation at 3 MeV; the oxygen concentration is normally less than 1016 at/cm3.

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Authors and Affiliations

  1. Service du Cyclotron, C.N.R.S/G.A.R.N.A.C., 3A, rue de la Ferollerie, 45045, Orleans Cédex, (France)

    R. Lacroix, G. Blondiaux, A. Giovagnoli, M. Valladon & J. L. Debrun

  2. Division I.C.m., C.N.E.T., 22301, Lannion, (France)

    R. Coquille & M. Gauneau

Authors
  1. R. Lacroix
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  2. G. Blondiaux
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  3. A. Giovagnoli
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  4. M. Valladon
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  5. J. L. Debrun
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  6. R. Coquille
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  7. M. Gauneau
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Lacroix, R., Blondiaux, G., Giovagnoli, A. et al. Determination of residual impurities in InP grown by the Czochralski method, using charged particle activation analysis. Journal of Radioanalytical and Nuclear Chemistry, Articles 83, 91–97 (1984). https://doi.org/10.1007/BF02209298

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  • DOI: https://doi.org/10.1007/BF02209298

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