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Determination of carbon and oxygen in polysilicon using a nuclear microprobe

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Abstract

A polycrystalline silicon specimen, cut off from an ingot directionally solidified from upgraded metallurgical grade silicon /UMG-Si/ has been examined using a 1.45 MeV deuteron microbeam. The superficial distributions of carbon and oxygen were determined by direct observation of nuclear reactions. Several carbon concentration ranges were identified. Oxygen is always strongly correlated with carbon, but the nature of this correlation has to be specified. The presence of iron was shown inside areas with strong carbon precipitation.

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Authors and Affiliations

  1. Section d'Etudes et d'Analyse Isotopique et Nucléaire, IRDI/DERDCA/DCAEA/SEA, C.E.N./Saclay, F. 91191, Gif sur Yvette Cedex, France

    P. Trocellier

  2. Centre d'Etudes de Chimie Métallurgique, CRNS, 15, rue George Urbain, F. 94400, Vitry sur Seine Cedex, France

    C. Cabanel & J. L. Pastol

  3. CNRS, Laboratoire “Pierre Süe”, C.E.N./Saclay, F. 91191, Gif sur Yvette Cedex, France

    G. Revel

Authors
  1. P. Trocellier
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  2. C. Cabanel
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  3. J. L. Pastol
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  4. G. Revel
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Trocellier, P., Cabanel, C., Pastol, J.L. et al. Determination of carbon and oxygen in polysilicon using a nuclear microprobe. Journal of Radioanalytical and Nuclear Chemistry Letters 118, 89–98 (1987). https://doi.org/10.1007/BF02166265

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  • DOI: https://doi.org/10.1007/BF02166265

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