Analysis of high-temperature superconducting films by X-ray fluorescence analysis
Radionuclide X-ray fluorescence analysis was used for the determination of Cu, Y and Ba in very thin high-temperature superconducting films. The precision of the method is better than 3% for about 1 μm thick films. The atomic emission ICP spectrometry was used to testify results of XRF analysis. An acceptable agreement of both methods was obtained.
KeywordsPhysical Chemistry Inorganic Chemistry Radionuclide Thick Film Atomic Emission
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