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Features of diffractometry of linear dimensions of single microelectronic elements

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Measurement Techniques Aims and scope

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Literature Cited

  1. Yu. A. Bystrov et al., Technological Checking of Dimensions in Microelectronic Production [in Russian], Radio i Svyaz', Moscow (1988).

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  2. L. G. Dubitskii (ed.), Optical Methods of Checking Integrated Microcircuits, State and Prospects of Improvements [in Russian], Radio i Svyaz', Moscow (1982).

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  3. M. Born and E. Wolf, Principles of Optics, 5th Ed., Pergamon (1975).

  4. V. A. Tarlykov, Izmer. Tekh., No. 8, 22 (1986).

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  5. M. M. Miroshnikov, Theoretical Principles of Opticoelectronic Devices [in Russian], Mashinostroenie, Leningrad (1983).

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Authors
  1. S. L. Zvonarev
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  2. V. V. Kiiko
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  3. V. A. Naumova
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  4. V. A. Tarlykov
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Additional information

Translated from Izmeritel'naya Tekhnika, No. 11, pp. 42–43, November, 1989.

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Zvonarev, S.L., Kiiko, V.V., Naumova, V.A. et al. Features of diffractometry of linear dimensions of single microelectronic elements. Meas Tech 32, 1086–1088 (1989). https://doi.org/10.1007/BF02159465

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  • DOI: https://doi.org/10.1007/BF02159465

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