Abstract
Carbon and oxygen impurities in silicon have been determined by 7.00 MeV3He activation analysis. The detection limits obtained for interference-free conditions are 0.1 ppb (wt) for carbon and 1.0 ppb (wt) for oxygen in silicon.
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Sanni, A.Q., Roché, N.G., Dowell, H.J. et al. On the determination of carbon and oxygen impurities in silicon by3He activation analysis. Journal of Radioanalytical and Nuclear Chemistry, Articles 81, 125–129 (1984). https://doi.org/10.1007/BF02132927
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DOI: https://doi.org/10.1007/BF02132927