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High Tc superconducting linear array ir detectors using YBa2Cu3O7-δ thin films

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Abstract

8-element linear array IR detectors based on high Tc superconducting films have been fabricated. The thin films were deposited by magnetron sputtering onZrO 2 substrates and patterned by standard photolithographic technique forming microbridge structure. An average detectivity of 1.85 × 109 cmHz 1/2 W−1 with a variance of less than 20% in the detector-to-detector detectivity of the array has been obtained at the operating temperature of 84K. A bolometric response mechanism has been discussed.

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Authors and Affiliations

  1. Department of Optoelectronic Engineering, Huazhong University of Science & Technology, 430074, Wuhan, China

    Xinjian Yi, Zhihong Mai, Xinrong Zhao & Fangqiao Zhou

  2. 25th Institute, 2nd Academy, China Aviation Industry Corporation, 100854, Beijing, China

    Luqin Liu

Authors
  1. Xinjian Yi
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  2. Zhihong Mai
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  3. Xinrong Zhao
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  4. Fangqiao Zhou
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  5. Luqin Liu
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Yi, X., Mai, Z., Zhao, X. et al. High Tc superconducting linear array ir detectors using YBa2Cu3O7-δ thin films. Int J Infrared Milli Waves 17, 705–710 (1996). https://doi.org/10.1007/BF02088365

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  • DOI: https://doi.org/10.1007/BF02088365

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