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Synthesis of iron silicides starting with Fe/Si multilayers

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Abstract

The iron silicides are considered key materials for silicon integrated optoelectronic devices. This report describes the synthesis of the iron silicides starting with e-beam evaporated multilayered Fe/Si samples. Samples with two chemical wavelengths were studied upon annealing and ion beam mixing. The characterization included X-ray diffraction, CEMS and Rutherford backscattering.

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Saul, C.K., Amaral, L. & Schreiner, W.H. Synthesis of iron silicides starting with Fe/Si multilayers. Hyperfine Interact 83, 321–325 (1994). https://doi.org/10.1007/BF02074293

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